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Padraig Timoney


Name:  Pádraig Timoney

Position:  Doctoral (PhD) Research

Room No.:  220

Tel: +353 1 716 1729

Fax: + 353 1 283 0534

E-mail:  padraig.timoney@ucd.ie

Qualifications: B.E. Mech (Hons.)

Professional Affiliations: MIEI, AMIMechE

 

Short Biography:

Pádraig Timoney graduated from University College Dublin in June 2006 with a BE (hons.) degree. He immeadiately joined the AMS research centre to commence doctoral research on optimization of the Chemical Mechanical Planarisation (CMP) process under the co-supervision of Dr. Eamonn Ahearne and Prof. Gerald Byrne.  

Pádraig is a member and an active participant in both Engineers Ireland (IEI) and the Institution of Mechanical Engineers (IMechE), serving as chairman of the IMechE Republic of Ireland region young members’ panel for 2006. During the course of the programme, Padraig won an award for best postgraduate student presentation at the Intel European research and Innovation Conference 2008.  

Pádraig successfully defended his PhD thesis on January 31st, 2011, and has published the final version. He is now awaiting conferring of his doctorate on August 29th, 2011.  

 

Research Interests:

  • Chemical mechanical planarisation of electronic substrates
  • Modelling of compliance/loop stiffness
  • Innovations in power generation technology

Research Project:

Modelling of Compliance in Chemical Mechanical Planarisation (CMP)

 

Keywords:

Modelling, Chemical Mechanical Planarisation, Silicon, Semiconductor Substrates

 

Description:

Development of finite element model (FEM) relating compliance of media in the force loop to uniformity of stress distribution in Chemical Mechanical Polishing (CMP).

Optimisation of key media in force loop to optimise stress distribution in CMP.

 

Academic Supervisor:

Prof. Dr.-Ing. Gerald Byrne

 

Sponsor:

Enterprise Ireland

 

Research Images:

Measured wafer contact pressure

FEA wafer contact pressure

 

Research Poster: