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Gerard O'Sullivan, Professor Atomic and Molecular Physics gerry.osullivan@ucd.ie Rm 113 Tel 2211

Padraig Dunne, Senior Lecturer Atomic and Molecular Physics padraig.dunne@ucd.ie Rm 211 Tel 2224

Fergal O'Reilly, Research and Development School of Physics fDOToreillyATucdDOTie Rm G19 Tel 2321

Emma Sokell, Senior Lecturer Atomic and Molecular Physics emma.sokell@ucd.ie Rm 313 Tel 2514

John K. White, Temporary Lecturer Atomic and Molecular Physics john.white@ucd.ie Rm 121 Tel 2209

Kenneth Fahy Atomic and Molecular Physics Rm G14 Tel 2159

Evgenia McLoughlin Atomic and Molecular Physics Rm 133 Tel 2159

Oran Morris Atomic and Molecular Physics Rm G14 Tel 2159

Aodh O'Connor Atomic and Molecular Physics Rm G14 Tel 2159

Paul Sheridan Atomic and Molecular Physics Rm 133 Tel 2205

Eileen Weadick Atomic and Molecular Physics Rm 133 Tel 2205

Khalil I. Hajim, Professor Atomic and Molecular Physics Rm 121

Alice Lynch Atomic and Molecular Physics Rm 133

Ronan Murphy Atomic and Molecular Physics Rm 133

A critical component for next generation computers is to etch feature sizes of 45 nm and beyond. The current industrial specification requires a 115-W, 13.5-nm over a 2% bandwidth, which can be achieved by a laser-produced or discharge plasma. Here, (visible) light from a tin LPP is captured.



Electron temperature of a tin LPP (Nd:YAG, peak of the pulse, 4.4 x 10¹¹ W/cm²). Note the hot dense core.



A direct double photo-ionisation spectrometer, used to detect the ejection of two electrons by one photon via one step.



The unresolved transition array (UTA) showing the hundreds of thousands of near-degenerate 4d-4f + 4p-4d transitions in a tin LPP.