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Fergal O'Reilly

Research Physics & Innovation Officer

School Of Physics
Science Centre
Belfield
Dublin 4

Tel: +353 1 7162321
Email: f.oreilly@ucd.ie

Biography

UCD School of Physics (2005 to date) - Research and Innovation Officer
SiriusXT Ltd (2015 to date) - Chief Technology Officer
UCD Dept of Mechanical Engineering (2004) - Research Fellow
Enterprise Ireland (2003-2004) - Research Engineer
NTera (Nanomat) Ltd (2001 - 2003) - Product Development Engineer
Plasma Ireland Ltd (1998-2001) - Plasma Systems Engineer
PhD Experimental Physics (1994-1998) - Photoabsorption and Photoemission Spectroscopy of Third and Fourth Row Ions

Professional

 

Associations

Association: Institute of Physics, Function/Role: Member

Patents

Patent EP1946331 : High Power EUV Light Source
Patent EP1259975 : Atmospheric pressure plasma system
     

Committees

Committee : College Research and Innovation Board
   

Languages

Italian:
   

Journals Edited

Journal Of Optics A-Pure And Applied Optics: Reviewer.
Journal Of Vacuum Science & Technology B: Reviewer.
 

Publications

     

Peer Reviewed Journals

O'Sullivan, G; Li, BW, D'Arcy, R , Dunne, P , Hayden, P , Kilbane, D , McCormack, T , Ohashi, O'Reilly, F ,Sheridan, P , Sokell, E , Suzuki, C, Higashiguchi, T (2015) 'Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 :144025. [DOI] [Details]
Lokasani, R; Long, E; Maguire, O; Sheridan, P; Hayden, P; O'Reilly, F; Dunne, P; Sokell, E ; Endo, A; Limpouch, J; O'Sullivan, G (2015) 'XUV spectra of 2nd transition row elements: identification of 3d-4p and 3d-4f transition arrays'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (24):245009. [DOI] [Details]
Wu, T; Higashiguchi, T; Li, BW; Suzuki, Y; Arai, G ; Dinh, TH; Dunne, P; O'Reilly, F; Sokell, E; O'Sullivan, G (2015) 'XUV spectral analysis of ns- and ps-laser produced platinum plasmas'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (24):245007. [DOI] [Details]
O'Sullivan, G. and Li, B. and Dunne, P. and Hayden, P. and Kilbane, D. and Lokasani, R. and Long, E. and Ohashi, H. and O'Reilly, F. and Sheil, J. and Sheridan, P. and Sokell, E. and Suzuki, C. and White, E. and Higashiguchi, T. (2015) 'Sources for beyond extreme ultraviolet lithography and water window imaging'. Physica Scripta, 90 (5):054002. Available Online [DOI] [Details]
Beyene, G. A., Tobin, I., Juschkin, L., Hayden, P., O'Sullivan, G., Sokell, E., Zakharov, V. S., Zakharov, S. V., O'Reilly, F. (2016) 'Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering'. Journal of Physics D-Applied Physics, 49 (22):10. Available Online [Details]
Wu, T; Higashiguchi, T; Li, BW; Arai, G; Hara, H; Kondo, Y; Miyazaki, T; Dinh, TH ; Dunne, P; O'Reilly, F; Sokell E and O¿Sullivan G (2016) 'Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd: YAG laser pulses'. Journal of Physics B: Atomic, Molecular and Optical Physics, 49 (3):035001. [Details]
Kambali I, Scally E, Dunne P, O'Sullivan G, Sheridan P, Sokell E and O'Reilly F (2013) 'A tin-gold alloy based EUV source for metrology applications'. Journal of Physics D - Applied Physics, 46 :495104. [DOI] [Details]
T. Donnelly, M. Mazoyer, A. Lynch, G. O'Sullivan, F. O'Reilly, P. Dunne, and T. Cummins (2012) 'CO2 laser pulse shortening by laser ablation of a metal target'. Review of Scientific Instruments, 83 (3):035102. [Details]
Tobin, I , Juschkin, L, Sidelnikov, Y ,O'Reilly, F ,Sheridan, P, Sokell, E, Lunney, JG (2013) 'Laser triggered Z-pinch broadband extreme ultraviolet source for metrology'. Applied Physics Letters, 102 (20):203504. [Details]
A O'Connor , P Dunne , O Morris , F O'Reilly , G O'Sullivan and E Sokell ; (2009) 'Investigation of ions emitted from a tin fuelled laser produced plasma source'. JOURNAL OF PHYSICS CONFERENCE SERIES, 163 (012116). Available Online [DOI] [Details]
G O'Sullivan, A Cummings, C Z Dong, P Dunne, P Hayden, O Morris, E Sokell, F O'Reilly, M G Su and J White ; (2009) 'Emission and absorption in laser produced plasmas: processes and applications'. JOURNAL OF PHYSICS CONFERENCE SERIES, 163 (012003). Available Online [DOI] [Details]
White, J., Dunne, P., Hayden, P., O'Reilly, F. and O'Sullivan, G.; (2007) 'Optimising 13.5-nm laser-produced tin plasma emission as a function of laser wavelength'. Applied Physics Letters, 90 (181502). Available Online [Details]
Morris O, Hayden P, Dunne P, O'Reilly F, O'Sullivan G, Sokell E , Antonsen EL , Srivastava SN , Thompson KC, Ruzic DN ; (2007) 'Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources'. JOURNAL OF PHYSICS CONFERENCE SERIES, 58 :391-394. [Details]
O. Morris, F. O'Reilly, P. Dunne, and P. Hayden ; (2008) 'Angular emission and self-absorption studies of a tin laser produced plasma extreme ultraviolet source between 10 and 18  nm'. Applied Physics Letters, 92 :231503. Available Online [DOI] [Details]
O Morris, P Hayden, P Dunne, F O'Reilly, G O'Sullivan, E Sokell, E L Antonsen, S N Srivastava, K C Thompson and D N Ruzic; (2007) 'Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources'. Journal of Physics, 58 :391-394. [Details]
Morris O; Hayden P; O'Reilly F; Murphy N; Dunne P; Bakshi V; (2007) 'Angle-resolved absolute out-of-band radiation studies of tin-based laser-produced plasma sources'. Applied Physics Letters, 91 :081506. [Details]
Cummings, A; O'Sullivan, G; Dunne, P; Sokell, E; Murphy, N; White, J; Hayden, P; Sheridan, P; Lysaght, M; O'Reilly, F; ; (2006) 'A spatio-temporal study of variable composition laser-produced Sn plasmas'. Journal of Physics D - Applied Physics, 39 (1):73-93. [Details]
Wang, M; Faulkner, R; O'Reilly, F; Manrique, J; Arnesen, A; Duffy, G; Dunne, P; Hallin, R; Heijkenskjold, F; O'Sullivan, G; ; (1999) 'Wavelengths and energy levels of potassium-like Ni x'. Journal of Physics B: Atomic, Molecular and Optical Physics, 32 (22):5299-5309. [Details]
Dunne, P; O'Reilly, F; O'Sullivan, G; Murphy, N; ; (1999) '4d photoabsorption in SnIII'. Journal of Physics B: Atomic, Molecular and Optical Physics, 32 (20):597-602. [Details]
F. O.Reilly & P. Dunne; (1998) '3d Photoabsorption in Zn II, Ga III and Ge I'. Journal of Physics B-Atomic Molecular and Optical Physi, 31 :1059. [Details]
F. O.Reilly & P. Dunne ; (1998) '3d Photoabsorption in Zn III and Ge V'. Journal of Physics B-Atomic Molecular and Optical Physi, 31 :L141. [Details]
M. Wang, F. O.Reilly, P.Dunne, A. Arnesen, F Heijkenskjold, R. Hallin & G. O.Sullivan; (1997) 'Wavelengths and energy levels of potassium-like Mn VII'. Journal of Physics B-Atomic Molecular and Optical Physi, 30 :4175-4181. [Details]
M. Wang, A. Arnesen, P. Dunne, R.Hallin, F Heijkenskjold & F. O.Reilly; (1997) 'Wavelengths and energy levels of Fe VIII'. Physica Scripta, T73 :77-78. [Details]

Other Journals

Donnelly T, Cummins T, O'Gorman C, Li BW, Harte CW, O'Reilly F, Sokell E, Dunne P and O'Sullivan G (2012) 'Laser produced plasma for efficient extreme ultraviolet light sources' AIP Conference Proceedings 1438 :155-160. [Details]

Conference Publications

Gerry O¿Sullivan, Deirdre Kilbane, Thomas Cummins, Rebekah D¿Arcy, Tony Donnelly, Akira Endo, Colm Harte, Takeshi Higashiguchi, Imam Kambali, Mahmoad Mahmoad, Colm O¿Gorman, Fergal O¿Reilly, Takamitsu Osuka, Enda Scally, Emma Sokell , John White and Padraig Dunne (2010) Towards Shorter Wavelength EUV and Soft X‐ray Sources 2010 International Workshop on Extreme Ultraviolet Sources Dublin, , 13-NOV-10 - 15-NOV-10 Available Online [Details]
Kenneth Fahy, Fergal O¿Reilly, Enda Scally, Imam Kambali and Paul Sheridan (2010) Robust liquid metal collector mirror for EUV and soft X-ray plasma sources 2010 International Workshop on Extreme Ultraviolet Sources Dublin, , 13-NOV-10 - 15-NOV-10 Available Online [Details]
Padraig Dunne, Thomas Cummins, John White, Deirdre Kilbane, Rebekah D¿Arcy, Emma Sokell, Thomas McCormack, Imam Kambali, Takamitsu Otsuka, Colm O¿Gorman, Enda Scally, Fergal O¿Reilly, Tony Donnelly and Gerry O¿Sullivan (2010) Laser-produced terbium & gadolinium Plasmas as EUVL Sources at 6.5 ¿ 6.7 nm 2010 International Workshop on EUV Lithography Maui, Hawaii, , 21-JUN-10 - 25-JUN-10 Available Online [Details]
Thomas Cummins, Gerry O¿Sullivan, Emma Sokell, Padraig Dunne, Fergal O¿Reilly and Tony Donnelly (2010) CO 2 Laser-produced Tin Plasmas as EUVL Sources 2010 International Workshop on EUV Lithography Maui, Hawaii, , 21-JUN-10 - 25-JUN-10 Available Online [Details]
Kenneth Fahy, Fergal O¿Reilly, Padraig Dunne and Paul Sheridan (2011) High Brightness Source Collector Module for EUV Mask Metrology 2011 International Workshop on EUV and Soft X-Ray Sources Dublin, , 07-NOV-11 - 10-NOV-11 Available Online [Details]
Kenneth Fahy, Fergal O¿Reilly, Enda Scally, Padraig Dunne & Paul Sheridan (2011) Progress on Liquid-Metal Collector Mirrors as Robust Plasma-Facing EUV & Soft X-ray Optics 2011 International Workshop on EUV Lithography Maui, Hawaii, , 13-JUN-11 - 17-JUN-11 Available Online [Details]
Larissa Juschkin, Fergal O¿Reilly (2012) Source Brightness Requirements for EUV Microscopes 2012 International Workshop on EUV and Soft X-Ray Sources Dublin, , 08-OCT-12 - 11-OCT-12 Available Online [Details]
Kenneth Fahy, Paul Sheridan,Padraig Dunne, and Fergal O¿Reilly (2012) Recent Progress on High Brightness Source Collector Module for EUV Mask Metrology 2012 International Workshop on EUV Lithography Maui, Hawaii, , 04-JUN-12 - 08-JUN-12 Available Online [Details]
Emma Sokell, Colm O¿Gorman, Bowen Li, Thomas Cummins, Padraig Dunne, Fergal O¿Reilly, Paddy Hayden, and Gerry O¿Sullivan (2013) A Systematic Study of Colliding Plasmas for EUVL 2013 International Workshop on EUV and Soft X-Ray Sources Dublin, , 03-NOV-13 - 07-NOV-14 Available Online [Details]
Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo , Bowen Li, Colm O¿Gorman, Thomas Cummings, Patrick Hayden, Tony Donnelly, Fergal O¿Reilly and Gerry O¿Sullivan (2013) Progress in Laser-Plasma Sources ¿ 13.5 nm & Beyond 2013 International Workshop on EUV Lithography Maui, Hawaii, , 10-JUN-13 - 14-JUN-13 Available Online [Details]
P. Sheridan, F. O¿Reilly and K. Fahy (2013) Tunable, High Brightness Lab-Scale Soft X-Ray Photons 2013 International Workshop on EUV and Soft X-ray Sources Dublin, , 03-NOV-13 - 07-NOV-13 Available Online [Details]
Fergal O¿Reilly, Kenneth Fahy, Paul Sheridan, Grzegorz Wielgoszewski, Niall Kennedy, Elaine Long, Emma Sokell, Gerry O¿Sullivan, Padraig Dunne (2014) Soft X-ray Source for high speed soft x-ray tomography of cryo-frozen cells EUV Source Workshop Dublin, , 03-NOV-14 - 06-NOV-14 Available Online [Details]
Padraig Dunne, Fergal O¿Reilly, Paul Sheridan and Kenneth Fahy (2014) STAN ¿ A Compact Light Source for EUV and Beyond 2013 International Workshop on EUV Lithography Maui, Hawaii, , 10-JUN-13 - 14-JUN-13 Available Online [Details]
Morris, O., Hayden, P., Dunne, P., O.Reilly, F., O.Sullivan, G., Sokell, E., Srivastava, S., Thompson, K. Ruzic, D.N. ; (2006) THE DETERMINATION OF CHARGE STATE, ENERGY AND ANGULAR DISTRIBUTIONS OF TIN IONS EMITTED FROM LASER PRODUCED PLASMA BASED EUV SOURCES 13th HCI Conference [Details]
Fergal O'Reilly, Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Oran Morris, John White and Gerry O'Sullivan; (2008) Liquid Metal EUV Collector Mirrors . In: EUV Litho Inc eds. 2008 International Workshop on EUV Lithography, Hawaii [Details]
Morris O., O'Reilly F., Hayden P., O'Sullivan G. and Dunne, P.; (2007) Angle-resolved spectroscopic studies of tin laser-produced plasmas from 10 ' 18 nm 2007 International EUVL Symposium [Details]
Morris, O., Dunne, P., O'Reilly, F., O'Sullivan, G., & Hayden, P.; (2007) Angle resolved absolute out-of-band radiation studies of tin-based laser produced plasma sources 9th European Conference on Atoms, Molecules and Photons [Details]
Fergal O'Reilly, Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Oran Morris, John White and Gerry O'Sullivan; (2008) Liquid Metal EUV Collector Mirrors Sematech EUV Source Workshop and Symposium, Lake Tahoe, CA [Details]
Fergal O'Reilly, Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Oran Morris, John White and Gerry O'Sullivan; (2008) Liquid Metal EUV Collector Mirrors Sematech EUV Source Workshop, Lake George, NY [Details]
F. O'Reilly, P. Dunne, O. Morris & P. Hayden ; (2006) Out-of-Band Radiation Measurements for Sn LPP Sematech EUV Source Development Workshop [Details]
                                                                                         

Research

Research Interests


Soft x-ray/EUV Optics/Source Development

I am currently developing very high average radiance and very simple soft  x-ray light sources for application in nanoscale bio-imaging and surface patterning.


My other research interests, where I am actively researching are:

Novel phosphors and photodetectors for soft x-ray imaging and spectroscopy with high time and spatial resolution.
Laser Plasma Photoemission and Absorption Spectroscopy
Laser Plasma Ion Spectroscopy
Novel Gamma Ray Optics and Sensors

 

Research Projects

Sponsor : Enterprise Ireland (EI)
Title : H2020 Travel Support - Brussels December 2013
Start Date / End Date : 13-DEC-13 / 12-JUN-14
Sponsor : Enterprise Ireland (EI)
Title : 3D Bio-imaging Microscope Platform
Start Date / End Date : 17-JUN-14 / 01-NOV-15
Sponsor : Enterprise Ireland (EI)
Title : Robust EUV collector mirror for next generation lithography
Start Date / End Date : 16-APR-07 / 16-MAR-08
Sponsor : Enterprise Ireland (EI)
Title : Increased efficiancy extreme ultraviolet light source component for next generation lithography
Start Date / End Date : 01-MAR-08 / 30-JUN-09
Sponsor : Enterprise Ireland (EI)
Title : Robust Mirrors for Extreme Ultraviolet Light Sources for Semiconductor Metrology and Laboratory Applications
Start Date / End Date : 01-SEP-09 / 01-NOV-11
Sponsor : Enterprise Ireland (EI)
Title : Robust Mirrors for Extreme Ultraviolet Light Sources for Semiconductor Metrology and Laboratory Applications
Start Date / End Date : 19-SEP-11 / 18-JAN-12
Sponsor : Enterprise Ireland (EI)
Title : Permanent Clarity ¿ Unspoilable optics for advanced industrial light sources and semiconductor plasma processing
Start Date / End Date : 01-JAN-13 / 31-JUL-14

Recent Postgraduates

I am currently supervising

Niall Kennedy (PhD)

and co-supervising
Girum Abebe (PhD) - Submitted
(with Prof Gerry O'Sullivan and Prof Larissa Juschkin)

and
Domagoj Kos (PhD)
(with Prof Emma Sokell)

and
Carmen Garcia
(with Prof Emma Sokell and Prof Padraig Dunne)

I have co-supervised to completion (with Prof Gerry O'Sullivan)
Enda Scally (PhD)
Imam Kambali (PhD)

MSc Supervised completed:
Elaine Long (MSc) (submitted 2013)

Current Postgraduate Students

Domagoj Kos, Doctor of Philosophy (PhD)   -   Secondary Supervisor
Carmen Vela Garcia, Doctor of Philosophy (PhD)   -   Thesis Co-Supervisor
Niall Kennedy, Doctor of Philosophy (PhD)   -   Secondary Supervisor

Collaborators

Internal Collaborators

Prof Gerry O'Sullivan - EUV and Ultrafast Laser Plasma Research
Dr Padraig Dunne - EUV and Ultrafast Laser Plasma Research
Dr Emma Sokell - EUV and Ultrafast Laser Plasma Research

Dr Kenneth Fahy - EUV Optics and Source development

Dr Paul Sheridan - EUV Source Development


Dr Lorraine Hanlon - Novel Gamma Ray Optics Research

Dr Tom McCormack and Dr Dimitri Scholz - Soft X-ray Microscopy

External Collaborators


Prof James Lunney - DCU - EUV Source Research

Prof Larissa Juschkin - RWTH Aachen - EUV Source Research