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Researchers at UCD

researcher

John Kingston White

Tutor

School Of Physics
Science Centre
Belfield
Dublin 4

Tel: +353 1 7162209
Email: john.white@ucd.ie

Biography

 

I have worked as a lecturer, project manager, researcher, computational physicist, computer programmer, and technical writer over a 25-year career in physics, engineering and education. My work has primarily focussed on computational modelling, especially with laser-produced plasmas, foundation engineering and nuclear fission.

My current research includes computational modelling of laser-produced plasma (LPP) light sources, with particular attention to radiation transport through optically thick plasmas. I created a 1-D model to optimise 13.5-nm emission for next generation lithography semiconductor manufacturing by statistically characterising computationally prohibitive unresolved transition arrays in multiply ionised hot dense plasmas.

I have written numerous codes, using atomic, electronic structure and radiation transport data to model LPPs, and have written or co-written over 20 papers pertaining to the work. I am now collaborating with a French SME (EPPRA) to incorporate my atomic models with their hydrodynamic plasma models for modelling both laser-produced and discharge-produced plasmas.


Publications

 

Book Chapters

White, J, Dunne, P., O'Sullivan, G; (2009) 'Steady-state and time-dependent LPP modelling' In: Lithography. intechweb.org: Intech. Available Online [Details]
G. O'Sullivan, A. Cummings, P. Dunne, P. Hayden, L. McKinney, N. Murphy and J. White.; (2006) 'Atomic physics of highly charged ions and the case for Sn as a source material' In: Vivek Bakshi (eds). EUV Sources for Lithography. USA: SPIE. [Details]
 

Peer Reviewed Journals

J. White, P. Dunne, P. Hayden, and G. O¿Sullivan; (2009) 'Simplified 1-D calculation of 13.5-nm emission in a tin plasma including radiation transport'. Journal of Applied Physics, . [Details]
D'Arcy R.; Ohashi H.; Suda S.; Tanuma H.; Fujioka S.; Nishimura H.; Nishihara K.; Suzuki C.; Kato T.; Koike F.; White J.; O'Sullivan G.; (2009) 'Transitions and the effects of configuration interaction in the spectra of Sn XV-Sn XVIII'. Physical Review A, 79 (4):1-7. Available Online [Details]
Su M. G.; Dong C. Z.; Murphy N.; O'Sullivan G.; Hayden P.; White J.; (2008) 'Theoretical analysis of xuv photoabsorption spectra of laser-produced iodine plasmas'. Physical Review A, 78 (4):1-8. Available Online [Details]
White, J., O'Sullivan, G., Zakharov, S., Choi, P., Zakharov, V., Nishimura, H., Fujioka, S., Nishihara, K., ; (2008) 'Tin laser-produced plasma source modeling at 13.5 nm for extreme ultraviolet lithography'. Applied Physics Letters, 92 (15). Available Online [Details]
White, J., Dunne, P., Hayden, P., O'Reilly, F. and O'Sullivan, G.; (2007) 'Optimising 13.5-nm laser-produced tin plasma emission as a function of laser wavelength'. Applied Physics Letters, 90 (181502). Available Online [Details]
White, J., Cummings, A., Hayden, P., Dunne, P. and O'Sullivan, G.; (2007) 'Simplified calculation of non-local thermodynamic equilibrium excited state populations contributing to 13.5-nm emission in a tin plasma'. Journal of Applied Physics, 101 (043301). Available Online [Details]
Cummings, A., O'Sullivan, G., Dunne, P., Sokell, E., Murphy, N., White, J., Hayden, P., Sheridan, P., Lysaght, M. O'Reilly, F.; (2006) 'A spatio-temporal study of variable composition laser 'produced tin plasmas'. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 39 (1):73-93. Available Online [Details]
Hayden, P., White, J., Cummings, A., Dunne, P., Lysaght, M., Murphy, N., Sheridan, P. O'Sullivan, G.; (2006) 'Tin based laser-produced plasma source development for EUVL'. MICROELECTRONIC ENGINEERING, 83 (4):699-702. Available Online [Details]
Hayden, P; Cummings, A; Murphy, N; O'Sullivan, G; Sheridan, P; White, J; Dunne, P; ; (2006) '13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources'. JOURNAL OF APPLIED PHYSICS, 99 (093302). Available Online [Details]
Cummings, A, O'Sullivan, G, Dunne, P, Sokell, E, Murphy, N, White, J, ; (2005) 'Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody'. Journal of Physics D-Applied Physics, 38 (4):604-616. [Details]
Hayden, P., Cummings, A., Gaynor, L., Murphy, N., O'Sullivan, G., Sheridan, P., Sokell, E., White, J. Dunne P.; (2005) '13.5 nm emission from composite targets containing tin'. PROCEEDINGS OF S.P.I.E, 5751 :919-926. Available Online [Details]
J. White, P. Hayden, P. Dunne, A. Cummings, N. Murphy, P. Sheridan and G. O'Sullivan; (2005) 'Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment'. Journal of Applied Physics, 98 (113301). Available Online [Details]
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell and J. White; (2005) 'Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody'. Journal of Physics D-Applied Physics, 38 :1-13. Available Online [Details]
K. Fahy, P. Dunne, L. McKinney, G. O'Sullivan, E. Sokell, J. White, A, Aguilar, J. Pomeroy, J. Tan, B Blagojevic, E-O LeBigot, and J. Gillaspy; (2004) 'UTA versus line emission for EUVL: studies on xenon emission at the NIST EBIT'. Journal of Physics D-Applied Physics, 37 :3225-3232. Available Online [Details]
G. O'Sullivan, A. Cummings, G. Duffy, P. Dunne, A. Fitzpatrick, P. Hayden, L. McKinney, N. Murphy, D. O'Reilly, E. Sokell, and J. White; (2004) 'Optimising an EUV source for 13.5 nm'. Proceedings of S.P.I.E, 5196 :273-281. [Details]
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, J. White, K. Fahy, A. Fitzpatrick, L. Gaynor, P. Hayden, D. Kedzierski, D. Kilbane, M. Lysaght, L. McKinney, and P. Sheridan; (2004) 'Variable composition laser-produced Sn plasmas'a study of their time-independent ion distributions'. Journal of Physics D-Applied Physics, 37 (17):2376-2384. Available Online [Details]
A. Anderson, B.H. Torrie, D.J. Danagher, D.G. Laurin, J.K. White, and W.W.E. Zung; (1987) 'Raman and Far-Infrared Spectra of Crystalline Methylene Chloride'. Journal of Raman Spectroscopy, 18 :325-328. [Details]
B.H. Torrie, A. Anderson, B. Andrews, D.G. Laurin, J.K. White and W.W.E. Zung; (1987) 'Raman and Far-Infrared Spectra of Crystalline Methylene Iodide'. Journal of Raman Spectroscopy, 18 :215-220. [Details]
A. Anderson, B.H. Torrie, D.J. Danagher, D.G. Laurin, J.K. White and W.W.E. Zung; (1986) 'Raman and Far-Infrared Spectra of Crystalline Methylene Bromide'. Journal of Raman Spectroscopy, 17 :97-100. [Details]

Other Journals

G. O'Sullivan, A. Cummings, P. Dunne, P. Hayden, L. McKinney, N. Murphy and J. White, ; (2005) 'Atomic Physics Of Highly Charged Ions And The Case For Sn As A Source Material' EUV Sources for Lithography . [Details]

Conference Publications

John White, Padraig Dunne, Oran Morris, Fergal O¿Reilly, Emma Sokell and Gerry O¿Sullivan, Sergey Zakharov, Vasily Zakharov and Peter Choi, K Nishihara, H Nishimura and S Fujioka; (2008) TIN LPP SOURCE MODELLING FOR EUVL AT 13.5 nm SEMATECH Knowledge Series Meetings 2008 International Symposium on Extreme Ultraviolet Lithography Lake Tahoe, California, , 28-SEP-08 - 02-OCT-08 [Details]
John White, Padraig Dunne, Oran Morris, Fergal O¿Reilly, Emma Sokell and Gerry O¿Sullivan; (2008) Tin LPP source modelling for EUVL at 13.5 nm SEMATECH Knowledge Series Meetings, EUV Source Workshop Bolton Landing (Lake George), NY, , 12-MAY-08 - 12-MAY-08 [Details]
John White, Padraig Dunne, Oran Morris, Fergal O¿Reilly, Emma Sokell and Gerry O¿Sullivan; (2008) Tin LPP source modelling for EUVL at 13.5 nm 14th International Conference on the Physics of Highly Charged Ions Chofu, Japan, , 31-AUG-08 - 05-SEP-08 [Details]
S. Zakharov, P. Choi, V. Novikov, V. Zakharov, A. Berezin, M. Markov, G. Soumagne, A. Sumitani, J. White, G. O'Sullivan; (2007) Modeling with the Code Z* of EUV Emission and Fast Particles Generation in DPP and LPP Sources EUV Source Workshop Baltimore, USA, , 06-MAY-07 [Details]
K. Nishihara, V. Bakshi, ..., G. O'Sullivan, J. White; (2006) EUV Source Modeling Benchmarking Status Report EUV Source Workshop Barcelona, Spain, , 19-DEC-06 - 19-DEC-06 [Details]
P. Hayden, A. Cummings, L. Gaynor, N. Murphy, G. O'Sullivan, P. Sheridan, E. Sokell, J. White and P. Dunne; (2005) 13.5 nm Emission from Composite Targets Containing Tin SPIE Emerging Lithographic Technologies San Jose, USA, , 01-MAR-05 - 03-MAR-05 [Details]
J. White, P. Hayden, P. Dunne, A. Cummings, N. Murphy, P. Sheridan, and G. O'Sullivan; (2005) A Statistical Approach to Tin-Based Plasmas in 13.5-nm EUV Lithography 37th EGAS Conference Dublin, Ireland, , 03-AUG-05 - 06-AUG-05 [Details]
J. White; (2003) Tomorrow's computer, today's physics Institute of Physics in Ireland Spring Weekend Wesport, Ireland, , 11-APR-03 - 13-APR-03 [Details]
A. Cummings, P. Dunne, A. Fitzpatrick, P. Hayden, L. McKinney, D. O'Reilly, J. White and G. O'Sullivan; (2003) 4d-4f narrow-band emission from plasmas containing tin as a highly efficient euv/soft x-ray source European Group for Atomic Spectroscopy 35 Brussels, , 15-JUL-03 - 18-JUL-03 [Details]
White, J.; (2004) The 13.5 nm unresolved transition array in tin Eighth International Colloquium on Atomic Spectra and Oscillator Strengths for Astrophysical and Laboratory Plasmas Madison, Wisconsin, [Details]
A. Cummings, G. Duffy, P. Dunne, A. Fitzpatrick, P. Hayden, L. McKinney, N. Murphy, D. O'Reilly, G. O'Sullivan, E. Sokell, and J. White; (2003) Optimising an EUV source for 13.5 nm SPIE Conference San Diego, [Details]
White, J.; (2003) Tomorrow's computer, today's physics IOP Conference Westport, Co. Mayo, [Details]
Bermingham, P. and White, J.; (1995) Pyrotechnics and the Accurate Prediction of Statnamic Peak Loading and Fuel Charge Size First International Statnamic Conference Vancouver, Canada, [Details]
Janes, M., Bermingham, P. and White, J.; (1995) Work, Velocity, and the Relationship of Shaft Stiffness in Statnamic Load Testing First International Statnamic Conference Vancouver, Canada, [Details]
Bermingham, P., Ealy, C.D. and White, J.K. ; (1994) A Comparison of Statnamic and Static Field Tests at Seven FHWA Sites FHWA Conference Orlando, Florida, [Details]
                                                                                         

Research

Research Interests

John White's research areas at UCD are extreme ultraviolet lithography source optimisation at 13.5 nm, UTA statistics, and laser produced plasma hydrodynamics modelling.

Key words:
  • EUVL, EUVL source, LPP, narrow bandwidth, semiconductor fabrication
  • Atomic structure data (esp. Sn), opacity, radiation transport, ion density, optimum concentration
  • EUV/SXR, complex atomic structure, hot dense plasma, wavefunction collapse/overlap, electronic detection

    Computer codes:
  • Cowan (atomic structure--oscillator strength versus wavelength)
  • Plasmod (steady state plasma model--ion distribution, average charge (with FOM oscillator and reflectivity weighting)
  • Medusa (plasma model--cell edge, velocity, electron density, density, pressure, electron temperature, ion temperature, Z state)
  •      

    Collaborators

     

    External Collaborators

    I am now collaborating with a French SME (EPPRA) to incorporate atomic models with hydrodynamic plasma models for modelling both laser-produced and discharge-produced plasmas. I am the coordinator of a FP7 Marie Curie IAPP grant with EPPRA and KIAM (Russia), specialising in laser-produced and discharge plasma solutions.