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Padraig Dunne

Professor

School Of Physics
Science Centre - North
Belfield
Dublin 4

Tel: +353 1 7162224
Email: padraig.dunne@ucd.ie

Biography

BSc in Experimental Physics, UCD 1989.
PhD in Atomic & Ionic Spectroscopy, UCD 1994.
Temporary Assistant Lecturer, UCD Department of Experimental Physics, 1990 - 1993.
Assistant Lecturer, UCD Department of Experimental Physics, 1994 - 1995.
College Lecturer, UCD Department of Experimental Physics, 1995 - 2002.
Senior Lecturer, UCD School of Physics, 2002 - Oct 2007.
Associate Professor, School of Physics Nov 2007 - date.
Associate Dean for Teaching & Learning, Faculty of Science, 2004 - 2005.
Postgraduate Coordinator, UCD School of Physics, 2005 - Oct 2007.
Research Sabbatical at the University of L'Aquila, Italy, Jan - Aug 2007.
Director of Graduate School, College of Engineering, Mathematical & Physical Sciences, Oct 2007 - Sept 2011.
Acting Head of School - Physics July 2009 - Jan 2010.
Head of School - Physics Jan 2012 - Aug 2016.

Professional

 

Associations

Association: 3rd International Workshop on EUV Lithography, Function/Role: Steering group member, session co-chair.
Association: 2nd International Workshop on EUV Lithography, Function/Role: Technical Steering Committee Member
Association: 1st international Workshop on EUV Lithography, Function/Role: Technical Steering Group Member
Association: Institute of Physics, F. Inst. P, C Phys since 1993, Function/Role: Fellow
Association: Chartered Physicist, C. Phys., Function/Role: *
Association: SPIE, the International Society for Optical Engineering, 1994, 1995, 2002, 2003 - date, Function/Role: Member
Association: New York Academy of Sciences 1995 - 1996, Function/Role: Member
Association: American Institute of Physics 1998 - 1999, Function/Role: Member
Association: International Scientific Advisory Committee 5th International Workshop, NDTCS :, Function/Role: Member
     

Conference Contributions

Padraig Dunne, Gerry O'Sullivan (2013) RECENT RESULTS IN EUV AND SOFT X-RAY SOURCE DEVELOPMENT. [Invited Oral Presentation], International Vacuum Congress IVC-19, Paris , 09-SEP-13 - 13-SEP-13.
Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Colm O¿Gorman, Thomas Cummings, Patrick Hayden, Tony Donnelly, Fergal O¿Reilly and Gerry O¿Sullivan (2013) Progress in Laser-Plasma Sources ¿ 13.5 nm & Beyond (P12). [Oral Presentation], 2013 International Workshop on Extreme Ultraviolet Lithography, Maui, USA , 10-JUN-13 - 14-JUN-13.
Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Emma Sokell, Padraig Dunne and Gerry O¿Sullivan (2013) Fundamental Atomic Process in Source Development for Beyond EUV Lithography and ¿Water Window¿ Imaging. [Invited Oral Presentation], 2013 International Workshop on EUV & Soft X-ray Sources, Dublin , 04-NOV-13 - 07-NOV-13.
P. Bowe, T. McCormack, P. Dunne and G. O'Sullivan,; Studies of theTemporal and Spatial Evolution of the Laser Produced Plasma Based on Stark Widths and Line Intensities. [N/A], 5th ECAMP (1995). , * .
Cummings, A., Dunne, P., Fitzpatrick, A., Hayden, P., McKinney, L., O'Reilly, D., O'Sullivan, G. and White, J.; 4d-4f narrow-band emission from plasmas containing tin as a highly efficient EUV/soft x-ray source. [N/A], : Proceedings 35th EGAS Conference Brussels, , Brussels .
A. Cummings, G. OSullivan, P. Dunne, E. Sokell, N.Murphy and J.White; Conversion efficiency of laser-produced Sn plasma at 13.5 nm, simulated with a 1D hydrodynamic model and treated as a multi-component blackbody. [N/A], 3rd International EUVL Symposium, Miyazaki, Japan. 2004 , Miyazaki, Japan .
G. OSullivan, A. Cummings, P. Dunne, K. Fahy, P. Hayden, M. Lysaght, N. Murphy, E. Sokell and J. White; Recent progress in source development for EUV lithography. [N/A], Joint ITC14 and ICAMDATA Toki, Japan. 2004, Toki, Japan .
P. Dunne, C. McGuinness, F. O'Reilly and G. O'Sullivan,; M and 0 Subshell Photoabsorption of Ions Using Laser Produced Plasmas. [N/A], Proc. ISAMDIP'95, * .
P. Bowe, T. McCormack, P. Dunne and G. O'Sullivan, ; Studies of theTemporal and Spatial Evolution of the Laser Produced Plasma Based on Stark Widths and Line Intensities. [N/A], 5th ECAMP(1995), * .
O Morris, A O'Connor, E Sokell and P Dunne; (2009) Angular distribution of the ion emission from a tin-based laser produced plasma EUV source. [Oral Presentation], 2nd International Workshop on EUV Lithography, Honolulu, Hawaii, USA , 14-JUL-09 - 17-JUL-09.
P Dunne; (2009) Panel discussion on EUVL R&D status. [Invited Oral Presentation], InternationalWorkshop on EUV Lithography, Honolulu, Hawaii, USA , 14-JUL-09 - 17-JUL-09.
A. O¿Connor, P. Dunne, P. Hayden, A.Hunniford*, B McCullough*, T Merrigan*, O. Morris,; (2008) Investigating the emission angle, charge, and energy of ions produced from laser. [Oral Presentation], The Belfast Atomic and Molecular Physics Meeting, Belfast, NI , 26-MAR-08 - 28-MAR-08.
Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Gerry O¿Sullivan and Fergal O¿Reilly ; (2008) Liquid Metal Collector Mirrors for EUV Lithography. [Poster Presentation], Sematech EUVL Symposium, Lake Tahoe, CA , 29-SEP-08 - 01-OCT-08.
Fergal O¿Reilly, Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Oran Morris, John White and Gerry O¿Sullivan; (2008) Liquid Metal EUV Collector Mirrors. [Poster Presentation], Sematech EUV Source Workshop, Bolton Landing (Lake George), NY , 12-MAY-08 - 12-MAY-08.
Oran Morris, Padraig Dunne, Paddy Hayden, Fergal O.Reilly, Gerry O.Sullivan and Emma Sokell.; (2007) Angle resolved, absolute out-of-band radiation and ion energy studies from tin based laser produced plasma EUV sources. [Poster Presentation (Refereed)], XXV International Conference on Photonic, Electronic and Atomic Collisions, Freiburg, Germany , 25-JUL-07 - 31-JUL-07.
Oran Morris, Padraig Dunne, Paddy Hayden, Fergal O'Reilly, Gerry O'Sullivan and Emma Sokell; (2007) Angle Resolved Studies from Tin Based Laser Produced Plasma Extreme Ultra-Violet Sources. [Poster Presentation], Institute of Physics in Ireland Spring Weekend Meeting, Birr, Co Offaly , 30-MAR-07 - 01-APR-07.
O. Morris, V. Bakshi, P. Dunne, E. Sokell, F. O'Reilly and G. O'Sullivan ; (2007) Angle-resolved studies of tin-based laser-produced plasma extreme ultraviolet lithography sources. [Poster Presentation], Photonics Ireland, Galwat , 24-SEP-07 - 26-SEP-07.
K. Fahy, G. OSullivan, P. Dunne, E. Sokell, A. Cummings, A. Fitzpatrick, P. Hayden, L. McKinney, J. White, A. Aguilar, J. M. Pomeroy, J. N. tan, B Blgojevic, E-O. LeBigot; (2004) EUV Spectroscopy of Xenon ions created using an electron beam ion trap. [Published Abstract], 8th EPS Conference on Atomic and Molecular Physics, Rennes, France , 06-JUL-04 - 10-JUL-04.
A. Cummings, P. Dunne, P. Hayden, A. Fitzpatrick, G. OSullivan, E. Sokell and J. White; (2003) EUVL source optimisation for 13.5 nm operation. [Poster Presentation], 2nd International EUVL Symposium, Antwerp, Belgium , 30-SEP-03 - 02-OCT-03.
G. OSullivan, A. Cummings, G. Duffy, P. Dunne, D. OReilly and E. Sokell; (2003) NARROW-BAND EMISSION FROM PLASMAS CONTAINING TIN AS A HIGHLY EFFICIENT EUV/SOFT X-RAY SOURCE. [N/A], Proc. XXIII International Conference on photonic, electronic and atomic collisions (ICPEAC) Stockholm, Sweden July 23-29, 2003 Th199, Stockholm, Sweden , 23-JUL-03 - 29-JUL-03.
G.OSullivan, A. Cummings, R. Faulkner and P. Dunne; (2002) 4d-4f narrow band emission in rare earth plasmas as a highly efficient EUV/Soft X-ray Source. [N/A], Proc. EUPS Symposium, Tsukuba, Japan Dec.2- 4, 2002, Tsukuba, Japan , 02-DEC-02 - 04-DEC-02.
Murphy, J. S. Hirsch, E. T. Kennedy, J. P. Mosnier, A. Neogi, J. T. Costello, D. Kilbane, G. OSullivan, P. Dunne, C. L. S. Lewis, S. Topping, D. Neely, P. Foster, E. Divall, C. Hooker, and A. Langley; (2002) VUV/Soft x-ray emission from plasmas formed in direct target and pre-plasma interactions with intense pico/femtosecond pulses. [N/A], Proc. 34th EGAS Conf. Sofia, Bulgaria, July9-12th 2002,, Sofia, Bulgaria , 09-JUL-02 - 12-JUL-02.
G. OSullivan, A. Cummings, G. Duffy, P. Dunne, D. Kilbane and E. Sokell; (2002) Investigation of EUV Sources for 13.5 nm Operation. [N/A], Proc. 34th EGAS Conf. Sofia, Bulgaria, July9-12th 2002, p199, Sofia, Bulgaria , 09-JUL-02 - 12-JUL-02.
G. OSullivan, A. Cummings, G. Duffy, P. Dunne, E. Sokell; (2002) Investigation of EUV Sources for 13.5 nm Operation. [N/A], Proc. SPIE Conf. 4876 Galway Sept.5-6 2002, Galway , 05-SEP-02 - 06-SEP-02.
P. Dunne, J. Hirsch, A. Murphy, E. T. Kennedy, J. Mosnier, A. Neogi, J. T. Costello, D. Kilbane, G. OSullivan; (2002) VUV and soft X-ray emission from pre-plasmas irradiated with intense picosecond and femtosecond pulses. [N/A], Proc. SPIE Conf. 4876 Galway Sept.5-6 2002, Galway , 05-SEP-02 - 06-SEP-02.
A. Cummings, J. Conway, J. T. Costello, P. Dunne, R. D'Arcy, E. T. Kennedy, C. McGuinness, N. Murphy, E. Sokell, B. Weinmann and G. O'Sullivan; (2000) Wave function collapse with increasing ionisation: Changes in behaviour in the elements near xenon. [Poster Presentation], 8th ICESS (International Conference on Electronic Spectroscopy and Structure) Berkeley, USA, Berkeley, California, USA , 08-AUG-00 - 12-AUG-00.
Morris, O., et al.; Peer reviewed proceedings, published in J Phys Conf. [Poster Presentation], 13th International Conference on Highly Charged Ions, Belfast, Northern Ireland .
Dunne, P., et al.; International Workshop for the EUV Source Community. [Invited Oral Presentation], EUV Source Workshop, Vancouver, Canada .
Dunne, P.; Research & Education meeting for Intel sponsored project managers in Europe, Middle East & Asia. [Poster Presentation], 11th EMEA Intel Academic Forum, Dublin .
P. Dunne & C. McGuinness.; A Dual Laser Produced Plasma Target Alignment System. [N/A], Proc. IOG 93, 6th Annual Irish Optoelectronics group Meeting. 1993, * .
Cummings, A., Dunne, P., Fitzpatrick, A., Hayden, P., McKinney, L., O'Reilly, D., O'Sullivan, G. and White, J; 4d-4f narrow-band emission from plasmas containing tin as a highly efficient EUV/soft x-ray source. [Invited Oral Presentation], Proceedings 35th EGAS Conference, Brussels .
G. O'Sullivan, P. Dunne, A. Cummings, C. McGuinness, P van Kampen & B. Weinmann; Some recent Results from Photoabsorption Studies of Ions. [N/A], Proc. 15th International Conference on Atomic Physics, TuD5, (1996), * .
O'Sullivan, G., Dunne, P., Sokell, E., Cummings, A., Murphy, N., Fahy, K., Fitzpatrick, A., Gaynor, L., Hayden, P., Kedzierski, D., Kilbane, D., Lysaght, M., McKinney, L. and White, J; (2003) EUVL source optimisation for 13.5 nm operation. [Poster Presentation (Refereed)], 2nd International Extreme Ultraviolet Symposium, Antwerp , 30-SEP-03 - 02-OCT-03.
Hayden P, White J, Sheridan P, O'Sullivan G, Dunne P, Murphy N and Cummings A; (2005) Tin based laser produced plasma source development for EUV lithography. [Poster Presentation (Refereed)], 37th EGAS COnference, DCu Dublin , 03-AUG-05 - 06-AUG-05.
Lysaght MA, Kilbane D, Cummings A, Murphy N, Dunne P, O'Sullivan G, van Kampen P, Costello JT and Kennedy ET; (2005) 4d photoabsorption spectra of neutral and low ion stages of Sn at the EUVL source wavelength, 13.5 nm. [Poster Presentation (Refereed)], 37th EGAS, DCU Dublin , 03-AUG-05 - 06-AUG-05.
White J, Hayden P, Dunne P, Cummings A, Murphy N, Sheridan P and O'Sullivan G.; (2005) A statistical approach to tin based plasmas for 13.5 nm EUV lithography. [Oral Presentation], 37th EGAS, DCU Dublin , 03-AUG-05 - 06-AUG-05.
Lysaght, M., Cummings, A., Dunne, P., OSullivan, G., Murphy, N., Kilbane, D., Costello, J., Kennedy, E., & van Kampen, P. ; (2005) Photoabsorption spectra of a laser produced Sn plasma. [Poster Presentation (Refereed)], Opto Ireland - Spectroscopy, Royal Dublin Society, Dublin , 04-APR-05 - 05-APR-05.
Hayden, P.B., Sheridan, P., O'Sullivan, G., Dunne, P. & Murphy, N.; (2005) EUV laser produced plasma source development for lithography. [Invited Oral Presentation], Opto Ireland - Spectroscopy, Royal Dublin Society, Dublin , 04-APR-05 - 05-APR-05.
Hayden, P., Cummings, A., Gaynor, L., Murphy, N., O'Sullivan, G., Sheridan, P., Sokell, E., White, J. & Dunne, P.; (2005) 13.5 emission from composite targets containing tin. [Poster Presentation (Refereed)], Microlithography 2005, SPIE Conf. 5751, San Jose, California , 01-MAR-05 - 03-MAR-05.
Hayden, P., Murphy, N., Cummings, A. , White, J., Lysaght, M., OSullivan, G., Sokell, E. and Dunne; (2004) Development of a source of radiation at 13.5 nm for photolithography. [Poster Presentation (Refereed)], 8th EPS Conference on Atomic and Molecular Physics, Rennes, France , 06-JUL-04 - 10-JUL-04.
 

Employment

Employer: UCD
Position: Lecturer
Employer: UCD
Position: Assistant lecturer
Employer: Uppsala University
Position: Visiting Lecturer
Employer: UCD
Position: Senior Lecturer

Education

Year 1989 Institution: University College Dublin
Qualification: BSc Subject:
Year 1994 Institution: University College Dublin
Qualification: PhD Subject:
   

Outreach Activities

School of Physics Structured Transition Year Experience - a one week long, full-time event for up to 24 transition year students. Co organiser with Dr Tom McCormack.
School visits, to talk to transition year students about Physics. Typically 3 visits per year.

Journals Edited

Applied Physics Letters: Reviewer.
 

Publications

 

Book Chapters

White, J, Dunne, P., O'Sullivan, G; (2009) 'Steady-state and time-dependent LPP modelling' In: White, J, Dunne, P., O'Sullivan, G; (eds). Lithography. intechweb.org: Intech. Available Online [Details]
Gerry O'Sullivan, Anthony Cummings, Padraig Dunne, Patrick Hayden, Luke McKinney, Nicola Murphy and John White.; (2005) 'Atomic Physics of Highly Charged Ions and the Case for Sn as a Source Material' In: Vivek Bakshi (eds). EUV Sources for Lithography. Bellingham, Washington, USA: SPIE Press. , pp.149-173 Available Online [Details]
 

Peer Reviewed Journals

Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Hiroyuki A Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike and Chihiro Suzuki (2015) 'Characteristics of x-ray emission from optically thin high-Z plasmas in the soft x-ray region'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 :144011. [DOI] [Details]
Yoshida, K. and Fujioka, S. and Higashiguchi, T. and Ugomori, T. and Tanaka, N. and Kawasaki, M. and Suzuki, Y. and Suzuki, C. and Tomita, K. and Hirose, R. and Ejima, T. and Ohashi, H. and Nishikino, M. and Sunahara, A. and Li, B. and Dunne, P. and O'Sullivan, G. and Yanagida, T. and Azechi, H. and Nishimura, H. (2015) 'Density and x-ray emission profile relationships in highly ionized high- Z laser-produced plasmas'. Applied Physics Letters, 106 (12). Available Online [DOI] [Details]
O'Sullivan, G. and Li, B. and Dunne, P. and Hayden, P. and Kilbane, D. and Lokasani, R. and Long, E. and Ohashi, H. and O'Reilly, F. and Sheil, J. and Sheridan, P. and Sokell, E. and Suzuki, C. and White, E. and Higashiguchi, T. (2015) 'Sources for beyond extreme ultraviolet lithography and water window imaging'. Physica Scripta, 90 (5):054002. Available Online [DOI] [Details]
Gerry O'Sullivan, Bowen Li, Rebekah D'Arcy, Padraig Dunne, Paddy Hayden, Deirdre Kilbane, Tom McCormack, Hayato Ohashi, Fergal O'Reilly, Paul Sheridan, Emma Sokell, Chihiro Suzuki and Takeshi Higashiguchi (2015) 'Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 :144025. [Details]
Tao Wu, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O'Reilly, Emma Sokell, Luning Liu and Gerry O¿Sullivan (2015) 'Analysis of extreme ultraviolet spectra from laser produced rhenium plasmas'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (16):165005. [DOI] [Details]
C Suzuki, F Koike, I Murakami, N Tamura, S Sudo, E Long, J Sheil, E White, F O'Reilly, E Sokell, P Dunne and G O'Sullivan (2015) 'EUVspectra from highly charged terbium ions in optically thin and thick plasmas'. Journal of Physics: Conference Series, 583 :012007. [DOI] [Details]
Bowen Li, Hiroyuki Hara, Yuhei Suzuki, Goki Arai, Takeshi Higashiguchi, Hayato Ohashi, Weihua Jiang, Tetsuya Makimura, Hiroyuki A Sakaue, Chihiro Suzuki, Daiji Kato, Izumi Murakami, Padraig Dunne, Elaine Long, Paul Sheridan, Ximeng Chen, Gerry O'Sullivan (2015) 'Properties of the extreme ultraviolet emission from germanium and gallium plasmas'. Journal of Applied Physics, 118 (7):073302. [DOI] [Details]
Thanh-Hung Dinh, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Shinsuke Fujioka, Noboru Hasegawa, Tetsuya Kawachi, Masaharu Nishikino, Takeshi Higashiguchi (2015) 'Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions'. Applied Physics Letters, 107 (12):121101. [DOI] [Details]
Ragava Lokasani1, Elaine Long, Oisin Maguire, Paul Sheridan, Patrick Hayden, Fergal O'Reilly, Padraig Dunne, Emma Sokell, Akira Endo, Jiri Limpouch and Gerry O'Sullivan (2015) 'XUV spectra of 2nd transition row elements: identification of 3d¿4p and 3d¿4f transition arrays'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (24):245009. [DOI] [Details]
Tao Wu1, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O'Reilly, Emma Sokell and Gerry O'Sullivan (2015) 'XUV spectral analysis of ns- and ps-laser produced platinum plasmas'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (24):245007. [DOI] [Details]
Gerry O'Sullivan, Padraig Dunne, Takeshi Higashiguchi, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O'Reilly, Paul Sheridan, John Sheil, Emma Sokell, Chihiro Suzuki, Tao Wu (2015) 'Spectroscopy for identification of plasma sources for lithography and water window imaging'. Journal of Physics: Conference Series, 636 (9):092037. [DOI] [Details]
H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O'Sullivan, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, C. Suzuki (2015) 'Characteristics of x-ray emission from optically thin high-Z plasmas in the soft x-ray region'. Journal of Physics B: Atomic, Molecular and Optical Physics, 48 (14):144011. [Details]
Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Weihua Jiang, Taisuke Miura, Akira Endo, Takeo Ejima, Bowen Li, Padraig Dunne, Gerry O¿Sullivan, Atsushi Sunahara ,and Takeshi Higashiguchi (2015) 'Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source'. Journal of Applied Physics, . [DOI] [Details]
Amitava Roy, Goki Arai, Hiroyuki Hara, Hayato Ohashi, Taisuke Miura, Akira Endo, Tomas Mocek, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O¿Sullivan and Takeshi Higashiguchi (2014) 'Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness sources'. Applied Physics Letters, 105 :074103. [DOI] [Details]
Higashiguchi, Takeshi; Li, Bowen; Suzuki, Yuhei; Kawasaki, Masato; Ohashi, Hayato; Torii, Shuichi; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Jiang, Weihua; (2014) 'Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas'. Optics Express, 21 (26):31837-31845. Available Online [Details]
Ohashi, Hayato; Higashiguchi, Takeshi; Suzuki, Yuhei; Arai, Goki; Otani, Yukitoshi; Yatagai, Toyohiko; Li, Bowen; Dunne, Padraig; O'Sullivan, Gerry; Jiang, Weihua; (2014) 'Quasi-Moseley's law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions'. Applied Physics Letters, 104 (23):234107. [DOI] [Details]
G O'Sullivan, T Cummins, P Dunne, A Endo, P Hayden, T Higashiguchi, D Kilbane, B li, C O'Gorman, T Otsuka, E Sokell and N Yugami Physica Scripta (T156), 014105 (2013) 'Recent progress in source development for lithography at 6. x nm'. Physica Scripta, T156 :014105. [DOI] [Details]
Kambali I, Scally E, Dunne P, O'Sullivan G, Sheridan P, Sokell E and O'Reilly F (2013) 'A tin-gold alloy based EUV source for metrology applications'. Journal of Physics D - Applied Physics, 46 :495104. [DOI] [Details]
Li BW, Higashiguchi T, Otsuka T, Yugami N, Dunne P, Kilbane D, Sokell E and O'Sullivan G (2014) 'Analysis of laser produced plasmas of gold in the 1-7 nm region'. Journal of Physics B: Atomic, Molecular and Optical Physics, 47 :075001. [DOI] [Details]
Cummins T, O'Gorman C, Dunne P, Sokell E, O'Sullivan G and Hayden P (2014) 'Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources'. Applied Physics Letters, 105 :044101. [DOI] [Details]
Li, BW,Higashiguchi, T,Otsuka, T,Jiang, WH,Endo, A,Dunne, P,O'Sullivan, G (2013) 'Water window sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth'. Applied Physics Letters, 102 . [DOI] [Details]
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne and Gerry O'Sullivan; (2012) 'Feasibility study of broadband efficient water window source'. Applied Physics Letters, 100 :014103-1-014103-4. Available Online [DOI] [Details]
T. Donnelly, M. Mazoyer, A. Lynch, G. O'Sullivan, F. O'Reilly, P. Dunne, and T. Cummins (2012) 'CO2 laser pulse shortening by laser ablation of a metal target'. Review of Scientific Instruments, 83 (3):035102. [Details]
Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, and Takeshi Higashiguchi; (2012) 'Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma'. Applied Physics Letters, 100 :061118-1-061118-3. Available Online [DOI] [Details]
Colm O'Gorman, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Thomas Cummins, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, and Takeshi Higashiguchi (2012) 'The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm'. Applied Physics Letters, 100 :141108-1-141108-4. Available Online [DOI] [Details]
Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Padraig Dunne and Gerry O'Sullivan (2012) 'XUV spectra of laser-produced zirconium plasmas'. Journal of Physics B-Atomic Molecular and Optical Physics, 45 . Available Online [DOI] [Details]
Bowen Li, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne and Gerry O¿Sullivan. (2012) 'Investigation of Gd and Tb plasmas for beyond extreme ultraviolet lithography based on multilayer mirror performance'. Applied Physics Letters, 101 (013112):013112-1-013112-4. [DOI] [Details]
Takeshi Higashiguchi, Hiromitsu Terauchi, Takamitsu Otsuka, Mami Yamaguchi, Keisuke Kikuchi, Noboru Yugami, Toyohiko Yatagai, Wataru Sasaki, Rebekah D¿Arcy, Padraig Dunne, and Gerry O¿Sullivan ; (2011) 'Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application'. Journal of Applied Physics, 109 (1). [DOI] [Details]
Li, BW,Dunne, P,Higashiguchi, T,Otsuka, T,Yugami, N,Jiang, WH,Endo, A,O'Sullivan, G (2011) 'Gd plasma source modeling at 6.7nm for future lithography'. Applied Physics Letters, 99 . [DOI] [Details]
Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Hiromitsu Terauchi, Noboru Yugami, Toyohiko Yatagai, Rebekah D¿Arcy, Padraig Dunne and Gerry O¿Sullivan; (2011) 'Spectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applications'. Applied Physics Letters, 98 . [DOI] [Details]
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Deirdre Kilbane, Padraig Dunne and Gerry O¿Sullivan; (2011) 'Extreme ultraviolet source at 6.7nm based on a low-density plasma'. Applied Physics Letters, 99 (191502):191502. Available Online [DOI] [Details]
O Morris, A O'Connor, E Sokell and P Dunne; (2010) 'Angular distribution of the ion emission from a tin-based laser-produced plasma extreme ultraviolet source'. Plasma Sources Science and Technology, 19 . Available Online [DOI] [Details]
Higashiguchi T (Higashiguchi, Takeshi), Terauchi H (Terauchi, Hiromitsu), Yugami N (Yugami, Noboru), Yatagai T (Yatagai, Toyohiko), Sasaki W (Sasaki, Wataru), D'Arcy R (D'Arcy, Rebekah), Dunne P (Dunne, Padraig), O'Sullivan G (O'Sullivan, Gerry); (2010) 'Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application'. Applied Physics Letters, 96 (13). Available Online [DOI] [Details]
Takamitsu Otsuka, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne and Gerry O¿Sullivan; (2010) 'Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources'. Applied Physics Letters, 97 :231503-1-231503-3. Available Online [DOI] [Details]
Takamitsu Otsuka, Deirdre Kilbane, John White, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O'Sullivan; (2010) 'Rare-earth plasma extreme ultraviolet sources at 6.5 - 6.7 nm'. Applied Physics Letters, 97 :111503-1-111503-3. Available Online [DOI] [Details]
P Zuppella, A Reale, A Ritucci, P Tucceri, S Prezioso, F Flora, L Mezi and P Dunne; (2009) 'Spectral enhancement of a Xe-based EUV discharge plasma source'. Plasma Sources Science and Technology, 18 :1-4. Available Online [DOI] [Details]
G O'Sullivan, A Cummings, C Z Dong, P Dunne, P Hayden, O Morris, E Sokell, F O'Reilly, M G Su and J White; (2009) ' Emission and absorption in laser produced plasmas: processes and applications'. JOURNAL OF PHYSICS CONFERENCE SERIES, 163 :012003-012010. Available Online [DOI] [Details]
J. White, P. Dunne, P. Hayden, and G. O¿Sullivan; (2009) 'Simplified 1-D calculation of 13.5-nm emission in a tin plasma including radiation transport'. Journal of Applied Physics, . [Details]
L Ottaviano, F Bussolotti, S Piperno, M Rinaldi, S Santucci, F Flora, L Mezi, P Dunne, J Kaiser, A Reale, A Ritucci and P Zuppella; (2008) 'Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography'. Plasma Sources Science and Technology, 17 (2):024019. Available Online [Details]
O. Morris, F. O'Reilly, P. Dunne and P. Hayden; (2008) 'Angular emission and self-absorption studies of a tin laser produced plasma extreme ultraviolet source between 10 and 18 nm'. Applied Physics Letters, 92 (23):231503-1-231503-3. Available Online [DOI] [Details]
White, J. Dunne, P. Hayden, P. O'Reilly, F. O'Sullivan, G.; (2008) 'Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength'. Journal of Applied Physics, 90 (18). [DOI] [Details]
Gaynor, L. Murphy, N. Dunne, P. O'Sullivan, G.; (2008) 'Extreme ultraviolet photoabsorption spectra of the Ce VI-Ce X isonuclear sequence'. Journal of Physics B-Atomic Molecular and Optical Physics, 41 (24). [DOI] [Details]
Morris, O; Hayden, P; OReilly, F; Murphy, N; Dunne, P; Bakshi, V; ; (2007) 'Angle-resolved absolute out-of-band radiation studies of a tin-based laser-produced plasma source'. Applied Physics Letters, 91 . [Details]
White, J; Dunne, P; Hayden, P; OReilly, F; OSullivan, G; ; (2007) 'Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength'. Applied Physics Letters, 90 . [Details]
White, J, Cummings, A, Dunne, P, Hayden, P, OSullivan, G, ; (2007) 'Simplified calculation of nonlocal thermodynamic equilibrium excited state populations contributing to 13.5 nm emission in a tin plasma'. Journal of Applied Physics, 101 . [Details]
Morris O, Hayden P, Dunne P, O'Reilly F, O'Sullivan G, Sokell E , Antonsen EL , Srivastava SN , Thompson KC, Ruzic DN ; (2007) 'Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources'. JOURNAL OF PHYSICS CONFERENCE SERIES, 58 :391-394. [Details]
Murphy, N, Cummings, A, Dunne, P, OSullivan, G, ; (2007) 'Vanishing resonances and excited populations: The 4d photoabsorption spectrum of Xe-like La3+ and I-like La4+'. Physical Review A - Atomic, Molecular, and Optical Physics, 75 . [Details]
Cummings, A; O'Sullivan, G; Dunne, P; Sokell, E; Murphy, N; White, J; Hayden, P; Sheridan, P; Lysaght, M; O'Reilly, F; ; (2006) 'A spatio-temporal study of variable composition laser-produced Sn plasmas'. Journal of Physics D - Applied Physics, 39 (1):73-93. [Details]
Murphy, N, Cummings, A, O'Sullivan, G, Dunne, P, ; (2006) '4d -> 5p transitions in the EUV photoabsorption spectrum of LaV, LaVI and LaVII'. Journal of Physics B: Atomic, Molecular and Optical Physics, 39 (14):3087-3095. [Details]
Murphy, N; Niga, P; Cummings, A; Dunne, P; O'Sullivan, G; ; (2006) '4d -> 5p transitions in the EUV photoabsorption spectrum of BaIV, BaV and BaVI'. Journal of Physics B: Atomic, Molecular and Optical Physics, 39 (2):365-373. [Details]
Hayden, P; Cummings, A; Murphy, N; O'Sullivan, G; Sheridan, P; White, J; Dunne, P; ; (2006) '13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources'. Journal of Applied Physics, 99 (9). [Details]
Hayden, P; White, J; Cummings, A; Dunne, P; Lysaght, M; Murphy, N; Sheridan, P; O'Sullivan, G; ; (2006) 'Tin based laser-produced plasma source development for EUVL'. Microelectronic Engineering, 83 (4-9):699-702. [Details]
A Cummings, G O'Sullivan, P Dunne, E Sokell, N Murphy and J White; (2005) 'Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody'. Journal of Physics D - Applied Physics, 38 (4):604-616. [Details]
Lysaght, M; Kilbane, D; Murphy, N; Cummings, A; Dunne, P; O'Sullivan, G; ; (2005) 'Opacity of neutral and low ion stages of Sn at the wavelength 13.5 nm used in extreme-ultraviolet lithography'. Physical Review A - Atomic, Molecular, and Optical Physics, 72 (1). [Details]
Hayden, P., Cummings, A., Gaynor, L., Murphy, N., O'Sullivan, G., Sheridan, P., Sokell, E., White, J. Dunne P.; (2005) '13.5 nm emission from composite targets containing tin'. PROCEEDINGS OF S.P.I.E, 5751 :919-926. Available Online [Details]
Lysaght, MA; Kilbane, D; Cummings, A; Murphy, N; Dunne, P; O'Sullivan, G; van Kampen, P; Costello, JT; Kennedy, ET; ; (2005) '4d photoabsorption spectra of SnII and SnIV in the 30-65 eV region'. JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 38 (23):4247-4257. [Details]
White, J; Hayden, P; Dunne, P; Cummings, A; Murphy, N; Sheridan, P; O'Sullivan, G; ; (2005) 'Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment'. Journal of Applied Physics, 98 (11). [Details]
Cummings, A; O'Sullivan, G; Dunne, P; Sokell, E; Murphy, N; White, J; ; (2005) 'Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody'. Journal of Physics D - Applied Physics, 38 (4):604-616. [Details]
Fahy, K, Dunne, P, McKinney, L, O'Sullivan, G, Sokell, E, White, J, Aguilar, A, Pomeroy, JM, Tan, JN, Blagojevic, B, LeBigot, EO, Gillaspy, JD, ; (2004) 'UTA versus line emission for EUVL: studies on xenon emission at the NIST EBIT'. Journal of Physics D - Applied Physics, 37 (23):3225-3232. [DOI] [Details]
Cummings, A, O'Sullivan, G, Dunne, P, Sokell, E, Murphy, N, White, J, Fahy, K, Fitzpatrick, A, Gaynor, L, Hayden, P, Kedzierski, D, Kilbane, D, Lysaght, M, McKinney, L, Sheridan, P, ; (2004) 'Variable composition laser-produced Sn plasmas - a study of their time-independent ion distributions'. Journal of Physics D - Applied Physics, 37 (17):2376-2384. [DOI] [Details]
G. O'Sullivan, A. Cummings, G. Duffy, P. Dunne, A. Fitzpatrick, P. Hayden, L. McKinney, N. Murphy, D. O'Reilly, E. Sokell, and J. White; (2004) 'Optimising an EUV source for 13.5 nm'. Proceedings of S.P.I.E, 5196 :273-281. [Details]
R. Faulkner, M. Wang, P. Dunne, A. Arnesen, R. Hallin, F Heijkenskjold & G. OSullivan,; (2001) 'Observations of (3d4p 3d4d) and (3d4d 3d4f) transitions in the vacuum ultraviolet spectra of calcium-like MnVI, FeVII and CoVIII'. Journal of Physics B-Atomic Molecular and Optical Physi, 34 :593-603. [Details]
G. Duffy, P. van Kampen & P.Dunne; (2001) '4d 5p transitions in the extreme ultraviolet photoabsorption spectra of SnII & SnIII'. Journal of Physics B-Atomic Molecular and Optical Physi, 34 :3171-3178. [Details]
Faulkner, R, Wang, MQ, Dunne, P, Arnesen, A, Heijkenskjold, F, Hallin, R, O'Sullivan, G, ; (2001) 'Observation of (3d4p -> 3d4d) and (3d4d -> 3d4f) transitions in the vacuum ultraviolet spectra of calcium-like MnVI, FeVII and CoVIII'. Journal of Physics B: Atomic, Molecular and Optical Physics, 34 (4):593-603. [Details]
Duffy, G, Dunne, P, ; (2001) 'The photoabsorption spectrum of an indium laser produced plasma'. Journal of Physics B: Atomic, Molecular and Optical Physics, 34 (6):173-178. [Details]
Duffy, G, van Kampen, P, Dunne, P, ; (2001) '4d -> 5p transitions in the extreme ultraviolet photoabsorption spectra of SnII and SnIII'. Journal of Physics B: Atomic, Molecular and Optical Physics, 34 (15):3171-3178. [Details]
P. Dunne, D. O'Reilly and G. O'Sullivan; (2000) 'Prepulse-enhanced narrow bandwidth soft X-ray emission from a low debris subnanosecond laser plasma source'. Applied Physics Letters, 76 (1):34-36. [Details]
M. Wang, R. Faulkner, F. OReilly, J. Manrique, A. Arnesen, G. Duffy, P. Dunne, R. Hallin, F Heijkenskjold & G. OSullivan,; (1999) 'Wavelengths and energy levels of potassium-like NiX'. Journal of Physics B-Atomic Molecular and Optical Physi, 32 :5299-5309. [Details]
Wang, M, Faulkner, R, O'Reilly, F, Manrique, J, Arnesen, A, Duffy, G, Dunne, P, Hallin, R, Heijkenskjold, F, O'Sullivan, G, ; (1999) 'Wavelengths and energy levels of potassium-like Ni x'. Journal of Physics B: Atomic, Molecular and Optical Physics, 32 (22):5299-5309. [Details]
Bowe, P, Conway, J, Dunne, P, McCormack, T, O'Sullivan, G, ; (1999) 'Effects of resonant pumping on the temporal and spatial evolution of a laser produced lithium plasma'. Journal of Applied Physics, 86 (6):3002-3009. [Details]
O'Sullivan, G, Carroll, PK, Dunne, P, Faulkner, R, McGuinness, C, Murphy, N, ; (1999) 'Supercomplex spectra and continuum emission from rare-earth ions: Sm, a case study'. Journal of Physics B: Atomic, Molecular and Optical Physics, 32 (8):1893-1922. [Details]
P. Dunne, F. OReilly, G. OSullivan and N. Murphy; (1999) '4d photoabsorption in SnIII'. Journal of Physics B-Atomic Molecular and Optical Physi, 32 :L525-L529. [Details]
F. OReilly & P. Dunne; (1998) '3d photoabsorption in ZnIII & GeIV'. Journal of Physics B-Atomic Molecular and Optical Physi, 31 :L141-L145. [Details]
O'Reilly, F, Dunne, P, ; (1998) '3d photoabsorption in Zn II, Ga III and Ge IV'. Journal of Physics B: Atomic, Molecular and Optical Physics, 31 (5):1059-1068. [Details]
O'Reilly, F, Dunne, P, ; (1998) '3d photoabsorption in Zn III and Ge V'. Journal of Physics B: Atomic, Molecular and Optical Physics, 31 (4):141-145. [Details]
Wang, M, OReilly, F, Dunne, P, Arnesen, A, Heijkenskjold, F, Hallin, R, OSullivan, G, ; (1997) 'Wavelengths and energy levels of potassium-like Mn VII'. Journal of Physics B: Atomic, Molecular and Optical Physics, 30 (19):4175-4181. [Details]
Wang, M, Arnesen, A, Dunne, P, Hallin, R, Heijkenskjold, F, OReilly, F, ; (1997) 'Wavelengths and energy levels of Fe VIII'. Physica Scripta, T73 (NA):77-78. [Details]
P. Dunne, G. OSullivan & V.K. Ivanov; (1995) 'The M-shell photoabsorption of Ge2+'. Journal of Physics B-Atomic Molecular and Optical Physi, 28 :1241-1250. [Details]
OSULLIVAN, G, CARROLL, PK, CONWAY, J, DUNNE, P, FAULKNER, R, MCCORMACK, T, MCGUINNESS, C, VANKAMPEN, P, WEINMANN, B, ; (1994) 'EXTREME-ULTRAVIOLET CONTINUUM EMISSION FROM LASER-GENERATED PLASMAS AND APPLICATIONS TO SPECTROSCOPY'. Optical Engineering, 33 (12):3993-3998. [Details]
P. Dunne, G. OSullivan & V.K. Ivanov; (1993) 'Extreme-ultraviolet absorption spectrum of Ga+'. Physical Review A - Atomic, Molecular, and Optical Physics, 48 (6):4358-4364. [Details]
P. Dunne & G. OSullivan; (1992) '4d105s-4d95s5p transitions in SnIV, SbV & TeVI'. Journal of Physics B-Atomic Molecular and Optical Physi, 25 :L593-L598. [Details]
COSTELLO, JT, DUNNE, P, OSULLIVAN, G, ; (1991) 'IDENTIFICATION OF 4S-4P TRANSITIONS IN RU-X, RU-XI, RH-XI, RH-XII, PD-XII, AND PD-XIII'. Journal of the Optical Society of America B: Optical Physics, 8 (7):1369-1371. [Details]
P. Dunne, P.K. Carroll, R. E. Corcoran, J. T. Costello & G. OSullivan; (1990) '4s 4p transitions in Ge-like Ru and Rh'. Journal of Physics B-Atomic Molecular and Optical Physi, 23 :L239-L245. [Details]
G. OSullivan P. Dunne, & J. T. Costello; (1990) '4s 4p transitions in As I-like RuXII, RhXIII and Pd XIV'. Journal of Physics B-Atomic Molecular and Optical Physi, 23 :L575-L581. [Details]

Other Journals

O'Sullivan, G., Cummings, A., Dunne, P., Fahy, K., Hayden, P., McKinney, L., Murphy, N., Sokell, E. White, J.; (2005) 'Recent progress in the development of sources for EUV lithography' AIP Conf. Proc . [Details]

Conference Publications

Hayden, P., White, J., Cummings, A., Dunne, P., Lysaght, M., Murphy, N., Sheridan, P. O'Sullivan, G.; (2005) Tin-based laser produced plasma source development for EUVL 4th EUVL Symposium , pp.234-248 [DOI] [Details]
Kenneth Fahy, Fergal O Reilly, Enda Scally, Padraig Dunne and Paul Sheridan (2011) Progress on Liquid Metal Collector Mirrors as Robust Plasma-Facing EUV and Soft -Ray Optics 2011 International workshop on EUV Lithography, June 13-17 2011, Makena Beach Golf Resort, Maui, Hawaii, USA [Details]
Paul Sheridan, Kenneth Fahy, Enda Scally, Padraig Dunne and Fergal O Reilly (2011) EUV Stability Measurements of Liquid Metal Collector Optics COST Action MPO601, 2011 [Details]
P. Dunne, V. K. Ivanov and G. O'Sullivan,; EUV Absorption Spectra of Ga+, Ga++ and Ge++ EPS-25th EGAS Conf. Abstracts 1-45, , (1993) Caen, [Details]
G. O'Sullivan, P. Dunne, A. Cummings, J. T. Costello, E.T. Kennedy, C. McGuinness, F. OReilly, P van Kampen & B. Weinmann,; Inner shell photoabsorption of ions with the dual laser produced plasma method fifth International Workshop on Autoionisation Phenomena in Ions, I67 (1996) *, [Details]
Gerry OSullivan, Anthony Cummings, Grainne Duffy, Padraig Dunne, Andrew Fitzpatrick, Paddy Hayden, Luke McKinney, Nicola Murphy, Dave OReilly, Emma Sokell and John White.; Optimising an EUV source for 13.5 nm SPIE Conf on Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, Sna Diego 2003 San Diego, [Details]
G. O'Sullivan, P. Dunne & V. K. Ivanov.; .3d and 3p EUV Absorption Spectroscopy og Ga+, Ga++ and Ge+ Proc. IOP Annual Congress, 4th ATMOP, W18 (1994) Brighton, , pp.92 [Details]
P. Bowe, T. McCormack, P. Dunne and G. O'Sullivan; Studies of the Temporal and Spatial Evolution of the Laser Produced Plasma Based on Stark Widths and Line Intensities 5th ECAMP, 19A, II, (1995) *, , pp.631 [Details]
P. Dunne, C. McGuinness, F. O'Reilly and G. O'Sullivan,; M and 0 Subshell Photoabsorption of Ions Using Laser Produced Plasmas Proc. ISAMDIP'95 (1995) *, , pp.63 [Details]
A. O'Connor, P. Dunne, P. Hayden, O. Morris, G. O'Sullivan, F. O'Reilly, and E. Sokell; (2008) Investigating the Emission Angle, Charge, and Energy of Ions Produced from Laser Produced Extreme Ultraviolet Sources 2008 International Workshop on EUV Lithography Maui, Hawaii, USA [Details]
K. Fahy, G. O'Sullivan, P. Dunne, P. Hayden & F. O'Reilly; (2008) Liquid Metal Collector Mirrors for EUV Lithography  2008 International Workshop on EUV Lithography Maui, Hawaii, USA [Details]
Fergal O'Reilly, Kenneth Fahy, Paul Sheridan, Padraig Dunne, Paddy Hayden, Tom McCormack, Oran Morris, John White and Gerry O'Sullivan; (2008) Liquid Metal EUV Collector Mirrors Sematech EUV Source Workshop and Symposium, Lake Tahoe, CA [Details]
Zupella, P., Bettotti, P., Bussolotti, F., Dunne, P., Flora, F., Mezi, L., Ottaviano, L., Pavesi, L., Piperno, A., Reale, A., Rinaldi, M., Ritucci A. & Santucci, S.; (2007) Recent progress in applications of the Ne-like Ar soft X-ray laser at L'Aquila University 28th International Conference on Phenomenoa in Ionised Gases [Details]
Morris, O., Dunne, P., O'Reilly, F., O'Sullivan, G., & Hayden, P.; (2007) Angle resolved absolute out-of-band radiation studies of tin-based laser produced plasma sources 9th European Conference on Atoms, Molecules and Photons [Details]
Murphy N., Gaynor L., Dunne P. & O'Sullivan G.; (2007) The effects of the presence of low-lying excited states on 4d photoabsorption of La & Ce ions 9th European Conference on Atoms, Molecules and Photons [Details]
Morris O., O'Reilly F., Hayden P., O'Sullivan G. and Dunne, P.; (2007) Angle-resolved spectroscopic studies of tin laser-produced plasmas from 10 ' 18 nm 2007 International EUVL Symposium [Details]
Morris, O., Dunne, P., O'Reilly, F., O'Sullivan, G., & Hayden, P.; (2007) Angle resolved absolute out-of-band radiation studies of tin-based laser produced plasma sources 9th European Conference on Atoms, Molecules and Photons [Details]
Morris, O., Dunne, P., O'Reilly, F., O'Sullivan, G., & Hayden, P.; (2007) Angle resolved absolute out-of-band radiation studies of tin-based laser produced plasma sources 9th European Conference on Atoms, Molecules and Photons [Details]
Dunne, P.; (2006) Source Development for EUV Lithography 11th Intel Academic Forum [Details]
Morris, O., Hayden, P., Dunne, P., O.Reilly, F., O.Sullivan, G., Sokell, E., Srivastava, S., Thompson, K. Ruzic, D.N. ; (2006) THE DETERMINATION OF CHARGE STATE, ENERGY AND ANGULAR DISTRIBUTIONS OF TIN IONS EMITTED FROM LASER PRODUCED PLASMA BASED EUV SOURCES 13th HCI Conference [Details]
Morris, O., Hayden, P., Dunne, P., O.Reilly, F., O.Sullivan, G., Sokell, E., Srivastava, S., Thompson, K. Ruzic, D.N. ; (2006) THE DETERMINATION OF CHARGE STATE, ENERGY AND ANGULAR DISTRIBUTIONS OF TIN IONS EMITTED FROM LASER PRODUCED PLASMA BASED EUV SOURCES 13th HCI Conference [Details]
O'Reilly, F., Dunne, P., Morris O. Hayden, P.; (2006) -of-Band Radiation Measurements for Sn LPP Sematech EUV Source Development Workshop [Details]
Dunne, P.; (2006) Integrating Undergraduates and Teachers into the Research Environment 11th Intel Academic Forum [Details]
Hayden, P., White, J., Cummings, A., Dunne, P., Lysaght, M., Murphy, N., Sheridan, P., O'Sullivan, G.; (2005) Tin-based laser produced plasma source development for EUVL MNE 05 MicroNano Europe [Details]
G. O'Sullivan, A. Cummings, P. Dunne, P. Hayden, M. Lysaght, N. Murphy, E. Sokell and J. White; (2004) Recent results on EUV emission from laser produced plasmas with slab targets containing tin 3rd International EUV Lithography Symposium Miyazaki, Japan, , 04-NOV-04 - 05-NOV-04 [Details]
A. Murphy, J. S. Hirsch, D. Kilbane, E. T. Kennedy, M. A. Khater, J-P. Mosnier, A. Neogi, G. OSullivan, C. L. S. Lewis, S. Topping, R. Clarke, E. Divall, P. Foster, C. Hooker, A. Langley, D. Neely, P. Dunne, and J. T. Costello; (2002) VUV and soft x-ray emission from pre-plasmas irradiated with picosecond and femtosecond pulses Opto Ireland Conf. 2002 Galway, [Details]
G. Duffy, N. Murphy, G. OSullivan & P. Dunne; (2000) Photoabsorption Spectroscopy of Indium and Tin Laser Produced Plasmas 32nd EGAS Conf., Vilnius, Lithuania, A-3 p. (2000) *, [Details]
G. OSullivan, R Faulkner, P. Dunne, M. Wang, A. Arnesen, F. Heijkenskjold and R. Hallin.; (2000) Spectra of Ca-Like Mn VI, Fe VII, Co VIII and Ni IX From Ion-Rare Gas Collisions 32nd EGAS Conf., Vilnius, Lithuania, P1-35 (2000) Vilnius, Lithuania, [Details]
A. Cummings, J. Conway, J. T. Costello, P. Dunne, R. DArcy, E.T. Kennedy, C. McGuinness, N. Murphy, E. Sokell, B. Weinmann and G. OSullivan; (2000) Wavefunction Collapse With Increasing Ionisation; Changes in the Behaviour in the Elements near Xenon 32nd EGAS Conf., Vilnius, Lithuania, P1-36 (2000) Vilnius, Lithuania, [Details]
P. Dunne & D. OReilly,; (2000) Soft x-ray Narrowband Laser Plasma Sources for Nanotechnology Proc. 3rd International Workshop on New Approaches to High Tech: Nondestructive Testing and Computer Simulations in Science and Engineering, (1999) *, , pp.31 [Details]
P. Dunne; (1999) Soft X-ray narrowband continuum emission from laser produced plasmas New Directions in Atomic Physics, ed. C.T. Whelan, R.M. Dreizler, J.H. Macek and H.R.J. Walters (Klewer, New York 1999) (1999) *, , pp.297-301 [Details]
P Dunne, G OSullivan, R. Faulkner & P. van Kampen,; (1997) Proc. 41st International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, C23, (1997) EUV/soft x-ray Narrowband Photolithography Laser Plasma Source *, , pp.89 [Details]
C. McGuinness, P. Dunne, G. O'Sullivan, J.T. Costello and E.T. Kennedy,; (1995) The 4f and 5d Photoabsorption Spectra of PbIII and BiIV Proc. 5th EPS Conf. on Atomic and Molecular Physics (ECAMP) 19A, I, (1995) *, , pp.628 [Details]
P. Dunne, P.K. Carroll, R. Corcoran, J. Costello and G. O'Sullivan; (1991) 4s-4p Transitions in Ge-like Ru., Rh., Pd and Ag 1st. Nat. Conf. on At. Mol. Opt. Phys. (ATMOP) Belfast W32 (1990) *, [Details]
G. O'Sullivan, P. Dunne and J.T. Costello,; (1991) .4s-4p Transitions in Ru and Rh along Ge, As, Se and Brl like Sequences 22nd EGAS Conf., Uppsala, P3-56 (1990) Uppsala, [Details]
P. Dunne, P. K. Carroll, R. E. Corcoran, J. T. Costello and G. O'Sullivan,; (1991) 4s-4p Transitions in RuX, XI, RHXI, Xll, Pd XII and Xlll Proc. 2nd ATMOP. London W44 (1991) *, [Details]
                                                                                         

Research

Research Interests

Laser Produced Plasmas (LPPs) as sources of ions and continuum radiation for photoabsorption spectroscopy. LPPs as sources of EUV radiation for next generation photolithography (at 13.5 nm) and microscopy/imaging. Target materials for LPP based sources. EUV & soft x-ray instrumentation. EUV applications in nanotechnology. New target materials for EUV sources below 10 nm, including the water window. High Harmonic Generation (HHG) in laser-produced plasmas.

http://www.ucd.ie/physics/research/atomicmolecularplasma/


Research Projects

Sponsor : Science Foundation Ireland (SFI)
Title : Coherent Short Wavelength Radiation - Resonantly enhanced high harmonic generation from colliding laser plasmas.
Start Date / End Date : 01-SEP-08 / 29-FEB-12
Sponsor : Irish Research Council for Science Engineering and Technology (IRCSET)
Title : Beyond 13.5AM-EUV laser plasma light source development
Start Date / End Date : 01-SEP-06 / 31-AUG-09
Sponsor : University College Dublin (UCD)
Title : Technological Plasma monitoring - a Global Standard
Start Date / End Date : 01-JUN-07 / 01-DEC-08
Sponsor : Intel Corporation, USA
Title : Determination of Ion Spectra and out-of-band radiation from LPP based EUV sources
Start Date / End Date : 01-SEP-05 / 30-JUN-12
Sponsor : University College Dublin (UCD)
Title : Extreme ultraviolet lasers - a new tool in Science
Start Date / End Date : 01-JAN-07 / 31-AUG-07
Sponsor : University College Dublin (UCD)
Title : Developing an Ultrafast Physics Modelling Capacity at UCD
Start Date / End Date : 01-JUN-07 / 01-DEC-08
Sponsor : Enterprise Ireland (EI)
Title : Clean High Power Extreme Ultraviolet Light Source (EUVS) - Proving Component Concepts
Start Date / End Date : 31-DEC-04 / 30-DEC-05
Sponsor : Irish Research Council for Science Engineering and Technology (IRCSET)
Title : Development of a plasma model for technological plasma assessment.
Start Date / End Date : 01-OCT-02 / 30-SEP-03
Sponsor : Enterprise Ireland (EI)
Title : Ultrafast x-ray dual laser plasma photoabsorption spectroscopy
Start Date / End Date : 01-OCT-02 / 30-SEP-05
Sponsor : Intel Ireland
Title : EUV Laser plasma source development
Start Date / End Date : 01-SEP-02 / 31-AUG-04
   

Collaborators

Internal Collaborators

Professor Gerry O'Sullivan, UCD School of Physics
Dr Emma Sokell, UCD School of Physics
Dr Fergal O'Reilly, UCD School of Physics
Dr Tom McCormack, UCD School of Physics

External Collaborators

Prof Armando Reale, Dr Luca Ottaviano and Ms Paola Zuppella.

Universita Degli Studi Dell'Aquila
Facolta Di Scienze, Matematiche, Fisiche e Naturali
Via Vetoio (Coppito)
67010 L'Aquila,
Italy.

A programme looking at coherent and incoherent EUV light sources, based in L'Aquila on the EUV capillary discharge laser and the incoherent discharge plasma source there, alongside the laser plasma EUV sources located at UCD. The applications of these sources include lithography, nanopattening, imaging and microscopy. The project developed as a result of the UCD Seed Fund scheme, under grant no. SF061 (2007)

Collaboration finished October 2008. 

Prof. Takeshi Higashiguchi
Centre for Optics Research & Education (CORE)
Utsunomiya University, Japan

EUV sources for next generation semiconductor lithography, short wavelength lasers, THz source for R&D, ultrashort laser physics. The programme involves joint research, including hosting Japanese students at UCD.


Dr Howard Scott
Lawrence Livermore National Laboratory (LLNL)
CA, USA.

Plasma modelling using the CRETIN code, for enhancement of laser-produced plasmas as sources of EUV radiation. Design of experiments to benchmark the CRETIN output for tin plasmas and to further understand the formation, evolution of and emission from laser-produced plasmas.